CMM- Scanning Electron Microscopy (SEM) and
Focussed Ion Beam (FIB)
Instrumentation for SEM and FIB:
SEM Instruments
- Hitachi S4800 High Resolution SEM
- Hitachi S4700 High Resolution SEM
- FEI Dual Beam 235 FIB
- JEOL 7000F Analytical SEM
- JEOL 6060LV General Purpose SEM
Scanning Electron Microscopy (SEM) and Focussed Ion Beam (FIB)
Hitachi S-4800 High Resolution SEM
Location
0018 Materials Research Laboratory
Capabilities
High Resolution Field Emission SEM
1 nm resolution at 15 kV, WD=4mm
1.4 nm resolution at 1 kV, WD=1.5nm, Deceleration mode
2.0 nm resolution at 1 kV, WD=1.5mm, Normal mode