CMM- Scanning Electron Microscopy (SEM) and
Focussed Ion Beam (FIB)
Instrumentation for SEM and FIB:
SEM Instruments
- Hitachi S4800 High Resolution SEM
- Hitachi S4700 High Resolution SEM
- FEI Dual Beam 235 FIB
- JEOL 7000F Analytical SEM
- JEOL 6060LV General Purpose SEM
Scanning Electron Microscopy (SEM) and Focussed Ion Beam (FIB)
Hitachi S-4700 High Resolution SEM
Location
0018 Materials Research Laboratory
Capabilities
High Resolution Low Voltage Imaging
Cold field emission gun: 2.5 nm resolution at 1kV, 1.5 nm resolution at 15 kV
Oxford Instruments ISIS EDS X-ray Microanalysis System
Centaurus BSE detector