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Materials Research Laboratory

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CMM- Transmission and Scanning Transmission Electron Microscopy (TEM and STEM)

Instrumentation for Transmission and Scanning Transmission Electron Microscopy:

TEM and STEM

Staff Contact:



Changhui Lei
(217) 244-6177
clei@illinois.edu

Mike Marshall
(217) 265-5380
mtmarsha@illinois.edu

Vacuum Generators HB501 STEM

Usage Rules
Links

General:
The HB501 is a dedicated analytic STEM. It is capable of forming a 0.3nm probe operating at 100kV, but is more typically used with a 1.0nm probe with over 1.0nA beam current. It can also be operated at much higher beam currents but with a loss of resolution. A double tilt holder is available with +-15 degrees of tilt. The system is fitted with digital scan control, light element EDS and parallel EELS. The cold field emitter has a very low intrinsic energy width (~0.35eV). EDS mapping and line scanning is available

Location
B58 Materials Research Laboratory

Specifications:

  • Energy 100kV
  • Tilt 15 degrees on two axes
  • Ultimate probe size 0.3nm (Typical: 0.6nm - 1.0nm - 1.5nm)
  • Simultaneous BF and ADF
  • Lens Type-Top entry

Attachments:

  • EDS - Oxford ISIS 30mm ATW detector
  • EELS - Gatan DigiPEELS
  • Digital Scan - Gatan Digiscan
  • Microdiffraction - Intensified TV lens coupled to phosphor screen
  • HAADF Mask