Materials Research Laboratory

Physical Electronics PHI 660

Location
B06 Materials Research Laboratory

General
The Physical Electronics model PHI 660 Scanning Auger Microprobe (SAM) has elemental mapping with high spatial resolution and is capable of performing scanning electron microscopy (SEM).

Features Excitation Source
Coaxial LaB6 Filament Electron Gun, ~100 nm Min. Spot Size for Auger Analysis, 0.5-20 KeV

Detection System
Single Pass Cylindical Mirror Analyzer
Single Channel Electron Multiplier

Sputtering System
Differentially Pumped 1-5 KeV Ar Ion Gun with Automatic Leak Valve

Additional Capabilities
Attached UHV Chamber for Sample Fracture or Heating