MRL

Materials Research Laboratory

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CMM- Scanning Electron Microscopy (SEM) and
Focussed Ion Beam (FIB)

Staff Contact:

Jim Mabon
(217) 333-4265
(217) 244-2177
mabon@illinois.edu

JEOL JSM-6060LV Low Vacuum Scanning Electron Microscope

Location
0021 Materials Research Laboratory

Links (below)

General
The JSM-6060LV is a general purpose high-performance scanning electron microscope with excellent secondary electron imaging and backscattered electron Imaging resolution. The intuitive PC interface allows the instrument to be easily operated by novices after a relatively short introduction to SEM and training session, along with some subsequent practice. The specimen chamber can accommodate a specimen of up to 5 inches in diameter. Operation training emphasizes "manual" operation and optimizing alignment and operating parameters, rather than automated functions, to facilitate better understanding of the basic theory of operation. As the user develops skills, this also helps insure optimal images are obtained. The fully automatic Low Vacuum (variable pressure) mode allows for observation of specimens that cannot be viewed at high vacuum because of a nonconductive surface or excessive water content. In addition to an X-ray microanalysis system, it can also perform basic EBIC imaging.

Major Specifications
Resolution High Vacuum mode: 3.5nm (30 kV, 6mm WD)
Low Vacuum mode: 4.0nm (30 kV, 6mm WD)
Accelerating Voltage 0.5 to 30 kV (53 steps)
Electron Source Pre-centered W hairpin filament
Probe Current 1 pA to ~1000nA
Magnification x5(48 mm WD) to 300,000 (149 steps)
Image Modes Secondary Electron Image Backscattered Electron Image (Composition, Topography, and Shadow), solid state type detectors
Objective Lens Conical lens, WD 6 to 48 mm
Objective Aperture 30 micron, manually centered with OL wobbler
Specimen Stage Eucentric goniometer, X=80mm, Y=40mm, Z=5 to 48mm, R=360° (endless), T=-10 to 90°
Image Store 1280 x 960 pixels
Analytical Working Distance 10mm for EDS and Standard Operation
Vacuum mode changeover Automatic (PC interface controlled)
LV mode (10 - 270 Pa)
LV Detecter: BEI (all modes)
Energy Dispersive X-ray Microanalysis System Oxford Instruments ISIS EDS System
10 mm2 ATW Si(Li) X-ray Detector
130 eV resolution (Mn K-alpha)
Light Element Detection (Be-U)
Sensitivities typically (0.1% - 1%)
Qualitative Analysis
Quantitative Analysis (excluding light elements and with certain limitations and requirements)
Digital X-ray Mapping and Imaging, X-ray Linescans

Links