MRL

Materials Research Laboratory

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CMM- Instruments

The CMM houses a suite of state-of-the-art instrumentation focussing on the micro- and nanocharacterization of materials using electron-beam, ion-beam, x-ray, and laser techniques. The CMM operates under the guidelines of the FSMRL Central Facilities philosophy that modern instrumentation for nanocharacterization of materials is most effectively utilized in a shared mode, supported by skilled professionals.



Instrumentation:



Accelerator-based Techniques for Analysis

High Voltage Engineering Van de Graaff

B70 MRL

(217) 333-1383

General Ionex Tandetron

124 ESB

(217) 333-1383

Scanning Electron Microscopy (SEM) and Focussed Ion Beam (FIB)

Hitachi S-4700 High Resolution SEM

0018 MRL

(217) 244-4520

FEI Dual Beam 235 FIB

B60 MRL

(217) 244-5465

JEOL 7000F Analytical SEM

0020 MRL

(217) 333-4265

JEOL 6060LV General Purpose SEM

0021 MRL

(217) 333-4265

Scanning Probe Microscopy (SPM)

Asylum Research MFP-3D AFM (2)

0014 MRL

(217) 244-2970

Veeco / Digital Instruments Dimension 3100 AFM

0014 MRL

(217) 244-2970

Veeco / Digital Instruments MultiMode AFM

0014 MRL

(217) 244-2970

Hysitron Triboscope

0014 MRL

(217) 244-2970

RHK UHV AFM

B51 MRL

(217) 244-2970

Omicron VT UHV STM

0013 MRL

(217) 244-4520

Surface Analysis

Physical Electronics PHI 660 Auger

B06 MRL

(217) 244-2963

Cameca ims 5f SIMS

B01 MRL

(217) 244-2965

Physical Electronics PHI Trift III SIMS

B04 MRL

(217) 244-2964

Kratos Axis ULTRA XPS

B81 MRL

(217) 244-2974

Physical Electronics PHI 5400 XPS

B08 MRL

(217) 244-2974

Sloan Dektak3 Profilometer

B80 MRL

(217) 333-0386

Transmission and Scanning Transmission Electron Microscopy (TEM) and (STEM)

JEOL 2010F (S)TEM

0026 MRL

(217) 244-6116

JEOL 2100 Cryo TEM

0011 MRL

(217) 244-0620

JEOL 2010LaB6 TEM

0017 MRL

(217) 244-0620

Philips CM12 TEM

B60 MRL

(217) 244-5465

Vacuum Generators HB501 STEM

B58 MRL

(217) 244-5465

X-ray Diffraction and Reflectivity (XRD) and (XRR)

Philips X'pert (2)

148 MRL

(217) 265-6799

Rigaku D-Max

148 MRL

(217) 265-6799

Rigaku Laue/Buerger

148 MRL

(217) 265-6799