Center for Microanalysis
of Materials
Facility Use Rates for the Material Research Laboratory facilities as of July 1st, 2008.
If you have any questions, please contact Timothy Spila at 217-244-0298 or the
director of our business office, Kris
Williams at 217-333-1374.
Rate table for UIUC academic users
Rate table for non UIUC academic users
Rate table for industrial users
Rate table for UIUC start-up companies
Center for Microanalysis of Materials | |||
| INSTRUMENT | TECHNIQUE | FEES | |
| staff-assisted | self-use | ||
| FEIDB235FIB | Scanning Electron/Focused Ion Beam Microscopy | 43/hr | 18/hr |
| PEITriftIIITOFSIMS | Secondary Ion Mass Spectroscopy/ Time-of-Flight | 40/hr | 15/hr |
| CamecaIMS5fSIMS | Secondary Ion Mass Spectroscopy/ Dynamic | 35/hr | 10/hr |
| IBMResearchLEEM | Low Energy Electron Microscopy | 40/hr | 15/hr |
| JEOL2010FEFFEG | (Scanning) Transmission Electron Microscopy/Analytical | 40/hr | 15/hr |
| JEOL2200FS | (Scanning) Transmission Electron Microscopy/Analytical | 45/hr | 20/hr |
| JEOL7000FSEM | Scanning Electron Microscopy/Analytical SEM | 38/hr | 13/hr |
| OmicronUHVVTSTM | Variable Temperature Scanning Tunneling Microscopy | 40/hr | 15/hr |
| GITandetron | Ion Accelerator/Rutherford Backscattering Spectroscopy | 35/hr | 10/hr |
| HitachiS4700SEM | Scanning Electron Microscopy/High Resolution | 38/hr | 13/hr |
| HitachiS4800SEM | Scanning Electron Microscopy/High Resolution | 38/hr | 13/hr |
| HVEVandeGraaf | Ion Accelerator/Rutherford Backscattering Spectroscopy | 35/hr | 10/hr |
| JEOL2010LaB6 | Transmission Electron Microscopy | 38/hr | 13/hr |
| JEOL2100CryoTEM | Transmission Electron Microscopy | 38/hr | 13/hr |
| KRATOSAXISXPS | X-Ray Photoelectron Spectroscopy/Imaging XPS | 35/hr | 10/hr |
| PEI5400XPS | X-Ray Photoelectron Spectroscopy | 35/hr | 10/hr |
| PEI660Auger | Auger Electron Spectroscopy | 35/hr | 10/hr |
| PhilipsCM12TEM | Transmission Electron Microscopy | 35/hr | 10/hr |
| RHKUHVAFM | Atomic Force Microscopy/ Ultra High Vacuum | 40/hr | 15/hr |
| VGHB501STEM | Scanning Transmission Electron Microscopy | 35/hr | 10/hr |
| AsylumAFM1 | Atomic Force Microscopy | 35/hr | 10/hr |
| AsylumAFM2 | Atomic Force Microscopy | 35/hr | 10/hr |
| Dektak3030 | Surface Profilometry | 35/hr | 10/hr |
| Dimension3100AFM | Atomic Force Microscopy | 35/hr | 10/hr |
| JEOL6060LVSEM | Scanning Electron Microscopy/ Low Vacuum | 35/hr | 10/hr |
| Kevex Analyst XRF | X-Ray Flourescence | 35/hr | 10/hr |
| MultimodeAFM | Atomic Force Microscopy | 35/hr | 10/hr |
| PhilipsXpert1 | X-Ray Diffraction/ High Resolution, Line Focus | 35/hr | 10/hr |
| PhilipsXpert2 | X-Ray Diffraction/ Point Focus | 35/hr | 10/hr |
| RigakuDMAXXRD | X-Ray Diffraction/ Powder | 35/hr | 10/hr |
| RigakuLAUE | X-Ray Diffraction | 35/hr | 10/hr |
| RigakuSAXS | X-Ray Diffraction | 35/hr | 10/hr |
| Scintag PAD-V | X-Ray Diffraction | 35/hr | 10/hr |
| Pump/Probe system | Thermoreflectance | 35/hr | 10/hr |
| SFG | Sum Frequency Generation | 35/hr | 10/hr |
| Raman | Raman Spectroscopy | 35/hr | 10/hr |
| Witec Alpha-SNOM | Near Field Scanning Optical Microscopy | 35/hr | 10/hr |
| Photoluminescence (LT) | Low Temperature PL | 35/hr | 10/hr |
| Photoluminescence (Time resolved) | Time Resolved PL | 35/hr | 10/hr |
| Woollam V-VASE | Spectroscopic Ellipsometry | 35/hr | 10/hr |
| FischioneMill1 | Ion Miller for TEM sample preparation | 30/hr | 5/hr |
| FischioneMill2 | Ion Miller for TEM sample preparation | 30/hr | 5/hr |
| GatanDuoMill | Ion Miller for TEM sample preparation | 30/hr | 5/hr |
| GatanPIPS | Ion Miller for TEM sample preparation | 30/hr | 5/hr |
| LeicaEMUC6Microtome | TEM sample preparation | 35/hr | 10/hr |
| Cary 5G | Spectrophotometry | 30/hr | 5/hr |
| OL750 | Spectroradiometry | 30/hr | 5/hr |
| Gaertner Ellipsometer | Ellipsometry | 30/hr | 5/hr |
| FTIR | Fourier Transform Infrared Spectroscopy | 30/hr | 5/hr |
| Staff Time/Consulting | 25/hr | ||
Microfabrication Facility | |||
| INSTRUMENT | staff-assisted | self-use | |
| Raith E-Line E.B. | 40/hr | 15/hr | |
| Float Zone Furnace | 100/hr | 50/hr | |
| Cleanroom and all other instruments | 50/hr | 13/hr | |
| Nano Tube Furnace | 100/day | 50/day | |
| High-T CM Furnace | 100/day | 50/day | |
| All other furnaces | 75/day | 25/day | |
| Training/person/instrument | 25 | ||
Low Temperature (SQUID) Facility (rates do not include He) | |||
| INSTRUMENT | staff-assisted | self-use | |
| 1T | 45/day+50/hr | 45/day | |
| 7T | 45/day+50/hr | 45/day | |
| PPMS | 45/day+50/hr | 45/day | |
Center for Microanalysis of Materials | |||
| INSTRUMENT | TECHNIQUE | FEES | |
| staff-assisted | self-use | ||
| FEIDB235FIB | Scanning Electron/Focused Ion Beam Microscopy | 80/hr | 50/hr |
| PEITriftIIITOFSIMS | Secondary Ion Mass Spectroscopy/ Time-of-Flight | 80/hr | 50/hr |
| CamecaIMS5fSIMS | Secondary Ion Mass Spectroscopy/ Dynamic | 70/hr | 40/hr |
| IBMResearchLEEM | Low Energy Electron Microscopy | 70/hr | 40/hr |
| JEOL2010FEFFEG | (Scanning) Transmission Electron Microscopy/Analytical | 70/hr | 40/hr |
| JEOL2200FS | (Scanning) Transmission Electron Microscopy/Analytical | 80/hr | 50/hr |
| JEOL7000FSEM | Scanning Electron Microscopy/Analytical SEM | 70/hr | 40/hr |
| OmicronUHVVTSTM | Variable Temperature Scanning Tunneling Microscopy | 70/hr | 40/hr |
| GITandetron | Ion Accelerator/Rutherford Backscattering Spectroscopy | 60/hr | 30/hr |
| HitachiS4700SEM | Scanning Electron Microscopy/High Resolution | 60/hr | 30/hr |
| HitachiS4800SEM | Scanning Electron Microscopy/High Resolution | 60/hr | 30/hr |
| HVEVandeGraaf | Ion Accelerator/Rutherford Backscattering Spectroscopy | 60/hr | 30/hr |
| JEOL2010LaB6 | Transmission Electron Microscopy | 60/hr | 30/hr |
| JEOL2100CryoTEM | Transmission Electron Microscopy | 60/hr | 30/hr |
| KRATOSAXISXPS | X-Ray Photoelectron Spectroscopy/Imaging XPS | 60/hr | 30/hr |
| PEI5400XPS | X-Ray Photoelectron Spectroscopy | 60/hr | 30/hr |
| PEI660Auger | Auger Electron Spectroscopy | 60/hr | 30/hr |
| PhilipsCM12TEM | Transmission Electron Microscopy | 60/hr | 30/hr |
| RHKUHVAFM | Atomic Force Microscopy/ Ultra High Vacuum | 60/hr | 30/hr |
| VGHB501STEM | Scanning Transmission Electron Microscopy | 60/hr | 30/hr |
| AsylumAFM1 | Atomic Force Microscopy | 55/hr | 25/hr |
| AsylumAFM2 | Atomic Force Microscopy | 55/hr | 25/hr |
| Dektak3030 | Surface Profilometry | 50/hr | 20/hr |
| Dimension3100AFM | Atomic Force Microscopy | 50/hr | 20/hr |
| JEOL6060LVSEM | Scanning Electron Microscopy/ Low Vacuum | 50/hr | 20/hr |
| Kevex Analyst XRF | X-Ray Flourescence | 50/hr | 20/hr |
| MultimodeAFM | Atomic Force Microscopy | 50/hr | 20/hr |
| PhilipsXpert1 | X-Ray Diffraction/ High Resolution, Line Focus | 50/hr | 20/hr |
| PhilipsXpert2 | X-Ray Diffraction/ Point Focus | 50/hr | 20/hr |
| RigakuDMAXXRD | X-Ray Diffraction/ Powder | 50/hr | 20/hr |
| RigakuLAUE | X-Ray Diffraction | 50/hr | 20/hr |
| RigakuSAXS | X-Ray Diffraction | 50/hr | 20/hr |
| Scintag PAD-V | X-Ray Diffraction | 50/hr | 20/hr |
| Pump/Probe system | Thermoreflectance | 50/hr | 20/hr |
| SFG | Sum Frequency Generation | 50/hr | 20/hr |
| Raman | Raman Spectroscopy | 50/hr | 20/hr |
| Witec Alpha-SNOM | Near Field Scanning Optical Microscopy | 50/hr | 20/hr |
| Photoluminescence (LT) | Low Temperature PL | 50/hr | 20/hr |
| Photoluminescence (Time resolved) | Time Resolved PL | 50/hr | 20/hr |
| Woollam V-VASE | Spectroscopic Ellipsometry | 50/hr | 20/hr |
| FischioneMill1 | Ion Miller for TEM sample preparation | 45/hr | 15/hr |
| FischioneMill2 | Ion Miller for TEM sample preparation | 45/hr | 15/hr |
| GatanDuoMill | Ion Miller for TEM sample preparation | 45/hr | 15/hr |
| GatanPIPS | Ion Miller for TEM sample preparation | 45/hr | 15/hr |
| LeicaEMUC6Microtome | TEM sample preparation | 45/hr | 15/hr |
| Cary 5G | Spectrophotometry | 45/hr | 15/hr |
| OL750 | Spectroradiometry | 45/hr | 15/hr |
| Gaertner Ellipsometer | Ellipsometry | 45/hr | 15/hr |
| FTIR | Fourier Transform Infrared Spectroscopy | 45/hr | 15/hr |
| Staff Time/Consulting | 30/hr | ||
Microfabrication Facility | |||
| INSTRUMENT | staff-assisted | self-use | |
| Raith E-Line E.B. | 80/hr | 50/hr | |
| Float Zone Furnace | 125/hr | 75/hr | |
| Cleanroom and all other instruments | 75/hr | 25/hr | |
| Nano Tube Furnace | 125/day | 75/day | |
| High-T CM Furnace | 125/day | 75/day | |
| All other furnaces | 100/day | 50/day | |
| Training/person/instrument | 50 | ||
Low Temperature (SQUID) Facility (rates do not include He) | |||
| INSTRUMENT | staff-assisted | self-use | |
| 1T | 200/day+50/hr | 200/day | |
| 7T | 200/day+50/hr | 200/day | |
| PPMS | 200/day+50/hr | 200/day | |
Center for Microanalysis of Materials | |||
| INSTRUMENT | TECHNIQUE | FEES | |
| staff-assisted | self-use | ||
| FEIDB235FIB | Scanning Electron/Focused Ion Beam Microscopy | 210/hr | 155/hr |
| PEITriftIIITOFSIMS | Secondary Ion Mass Spectroscopy/ Time-of-Flight | 210/hr | 155/hr |
| CamecaIMS5fSIMS | Secondary Ion Mass Spectroscopy/ Dynamic | 210/hr | 155/hr |
| IBMResearchLEEM | Low Energy Electron Microscopy | 210/hr | 155/hr |
| JEOL2010FEFFEG | (Scanning) Transmission Electron Microscopy/Analytical | 210/hr | 155/hr |
| JEOL2200FS | (Scanning) Transmission Electron Microscopy/Analytical | 210/hr | 155/hr |
| JEOL7000FSEM | Scanning Electron Microscopy/Analytical SEM | 210/hr | 155/hr |
| OmicronUHVVTSTM | Variable Temperature Scanning Tunneling Microscopy | 210/hr | 155/hr |
| GITandetron | Ion Accelerator/Rutherford Backscattering Spectroscopy | 210/hr | 155/hr |
| HitachiS4700SEM | Scanning Electron Microscopy/High Resolution | 210/hr | 155/hr |
| HitachiS4800SEM | Scanning Electron Microscopy/High Resolution | 210/hr | 155/hr |
| HVEVandeGraaf | Ion Accelerator/Rutherford Backscattering Spectroscopy | 210/hr | 155/hr |
| JEOL2010LaB6 | Transmission Electron Microscopy | 210/hr | 155/hr |
| JEOL2100CryoTEM | Transmission Electron Microscopy | 210/hr | 155/hr |
| KRATOSAXISXPS | X-Ray Photoelectron Spectroscopy/Imaging XPS | 210/hr | 155/hr |
| PEI5400XPS | X-Ray Photoelectron Spectroscopy | 210/hr | 155/hr |
| PEI660Auger | Auger Electron Spectroscopy | 210/hr | 155/hr |
| PhilipsCM12TEM | Transmission Electron Microscopy | 210/hr | 155/hr |
| RHKUHVAFM | Atomic Force Microscopy/ Ultra High Vacuum | 210/hr | 155/hr |
| VGHB501STEM | Scanning Transmission Electron Microscopy | 210/hr | 155/hr |
| AsylumAFM1 | Atomic Force Microscopy | 175/hr | 120/hr |
| AsylumAFM2 | Atomic Force Microscopy | 175/hr | 120/hr |
| Dektak3030 | Surface Profilometry | 175/hr | 120/hr |
| Dimension3100AFM | Atomic Force Microscopy | 175/hr | 120/hr |
| JEOL6060LVSEM | Scanning Electron Microscopy/ Low Vacuum | 175/hr | 120/hr |
| Kevex Analyst XRF | X-Ray Flourescence | 175/hr | 120/hr |
| MultimodeAFM | Atomic Force Microscopy | 175/hr | 120/hr |
| PhilipsXpert1 | X-Ray Diffraction/ High Resolution, Line Focus | 175/hr | 120/hr |
| PhilipsXpert2 | X-Ray Diffraction/ Point Focus | 175/hr | 120/hr |
| RigakuDMAXXRD | X-Ray Diffraction/ Powder | 175/hr | 120/hr |
| RigakuLAUE | X-Ray Diffraction | 175/hr | 120/hr |
| RigakuSAXS | X-Ray Diffraction | 175/hr | 120/hr |
| Scintag PAD-V | X-Ray Diffraction | 175/hr | 120/hr |
| Pump/Probe system | Thermoreflectance | 175/hr | 120/hr |
| SFG | Sum Frequency Generation | 175/hr | 120/hr |
| Raman | Raman Spectroscopy | 175/hr | 120/hr |
| Witec Alpha-SNOM | Near Field Scanning Optical Microscopy | 175/hr | 120/hr |
| Photoluminescence (LT) | Low Temperature PL | 175/hr | 120/hr |
| Photoluminescence (Time resolved) | Time Resolved PL | 175/hr | 120/hr |
| Woollam V-VASE | Spectroscopic Ellipsometry | 175/hr | 120/hr |
| FischioneMill1 | Ion Miller for TEM sample preparation | 120/hr | 65/hr |
| FischioneMill2 | Ion Miller for TEM sample preparation | 120/hr | 65/hr |
| GatanDuoMill | Ion Miller for TEM sample preparation | 120/hr | 65/hr |
| GatanPIPS | Ion Miller for TEM sample preparation | 120/hr | 65/hr |
| LeicaEMUC6Microtome | TEM sample preparation | 120/hr | 65/hr |
| Cary 5G | Spectrophotometry | 120/hr | 65/hr |
| OL750 | Spectroradiometry | 120/hr | 65/hr |
| Gaertner Ellipsometer | Ellipsometry | 120/hr | 65/hr |
| FTIR | Fourier Transform Infrared Spectroscopy | 120/hr | 65/hr |
| Staff Time/Consulting | 55/hr | ||
Microfabrication Facility | |||
| INSTRUMENT | staff-assisted | self-use | |
| Raith E-Line E.B. | 210/hr | 155/hr | |
| Float Zone Furnace | 175/hr | 125/hr | |
| Cleanroom and all other instruments | 100/hr | 50/hr | |
| Nano Tube Furnace | 175/day | 125/day | |
| High-T CM Furnace | 175/day | 125/day | |
| All other furnaces | 150/day | 100/day | |
| Training/person/instrument | 100 | ||
Low Temperature (SQUID) Facility (rates do not include He) | |||
| INSTRUMENT | staff-assisted | self-use | |
| 1T | 300/day+75/hr | 300/day | |
| 7T | 300/day+75/hr | 300/day | |
| PPMS | 300/day+75/hr | 300/day | |
Center for Microanalysis of Materials | |||
| INSTRUMENT | TECHNIQUE | FEES | |
| staff-assisted | self-use | ||
| FEIDB235FIB | Scanning Electron/Focused Ion Beam Microscopy | 130/hr | 85/hr |
| PEITriftIIITOFSIMS | Secondary Ion Mass Spectroscopy/ Time-of-Flight | 130/hr | 85/hr |
| CamecaIMS5fSIMS | Secondary Ion Mass Spectroscopy/ Dynamic | 130/hr | 85/hr |
| IBMResearchLEEM | Low Energy Electron Microscopy | 130/hr | 85/hr |
| JEOL2010FEFFEG | (Scanning) Transmission Electron Microscopy/Analytical | 130/hr | 85/hr |
| JEOL2200FS | (Scanning) Transmission Electron Microscopy/Analytical | 130/hr | 85/hr |
| JEOL7000FSEM | Scanning Electron Microscopy/Analytical SEM | 130/hr | 85/hr |
| OmicronUHVVTSTM | Variable Temperature Scanning Tunneling Microscopy | 130/hr | 85/hr |
| GITandetron | Ion Accelerator/Rutherford Backscattering Spectroscopy | 130/hr | 85/hr |
| HitachiS4700SEM | Scanning Electron Microscopy/High Resolution | 130/hr | 85/hr |
| HitachiS4800SEM | Scanning Electron Microscopy/High Resolution | 130/hr | 85/hr |
| HVEVandeGraaf | Ion Accelerator/Rutherford Backscattering Spectroscopy | 130/hr | 85/hr |
| JEOL2010LaB6 | Transmission Electron Microscopy | 130/hr | 85/hr |
| JEOL2100CryoTEM | Transmission Electron Microscopy | 130/hr | 85/hr |
| KRATOSAXISXPS | X-Ray Photoelectron Spectroscopy/Imaging XPS | 130/hr | 85/hr |
| PEI5400XPS | X-Ray Photoelectron Spectroscopy | 130/hr | 85/hr |
| PEI660Auger | Auger Electron Spectroscopy | 130/hr | 85/hr |
| PhilipsCM12TEM | Transmission Electron Microscopy | 130/hr | 85/hr |
| RHKUHVAFM | Atomic Force Microscopy/ Ultra High Vacuum | 130/hr | 85/hr |
| VGHB501STEM | Scanning Transmission Electron Microscopy | 130/hr | 85/hr |
| AsylumAFM1 | Atomic Force Microscopy | 115/hr | 70/hr |
| AsylumAFM2 | Atomic Force Microscopy | 115/hr | 70/hr |
| Dektak3030 | Surface Profilometry | 115/hr | 70/hr |
| Dimension3100AFM | Atomic Force Microscopy | 115/hr | 70/hr |
| JEOL6060LVSEM | Scanning Electron Microscopy/ Low Vacuum | 115/hr | 70/hr |
| Kevex Analyst XRF | X-Ray Flourescence | 115/hr | 70/hr |
| MultimodeAFM | Atomic Force Microscopy | 115/hr | 70/hr |
| PhilipsXpert1 | X-Ray Diffraction/ High Resolution, Line Focus | 115/hr | 70/hr |
| PhilipsXpert2 | X-Ray Diffraction/ Point Focus | 115/hr | 70/hr |
| RigakuDMAXXRD | X-Ray Diffraction/ Powder | 115/hr | 70/hr |
| RigakuLAUE | X-Ray Diffraction | 115/hr | 70/hr |
| RigakuSAXS | X-Ray Diffraction | 115/hr | 70/hr |
| Scintag PAD-V | X-Ray Diffraction | 115/hr | 70/hr |
| Pump/Probe system | Thermoreflectance | 115/hr | 70/hr |
| SFG | Sum Frequency Generation | 115/hr | 70/hr |
| Raman | Raman Spectroscopy | 115/hr | 70/hr |
| Witec Alpha-SNOM | Near Field Scanning Optical Microscopy | 115/hr | 70/hr |
| Photoluminescence (LT) | Low Temperature PL | 115/hr | 70/hr |
| Photoluminescence (Time resolved) | Time Resolved PL | 115/hr | 70/hr |
| Woollam V-VASE | Spectroscopic Ellipsometry | 115/hr | 70/hr |
| FischioneMill1 | Ion Miller for TEM sample preparation | 75/hr | 30/hr |
| FischioneMill2 | Ion Miller for TEM sample preparation | 75/hr | 30/hr |
| GatanDuoMill | Ion Miller for TEM sample preparation | 75/hr | 30/hr |
| GatanPIPS | Ion Miller for TEM sample preparation | 75/hr | 30/hr |
| LeicaEMUC6Microtome | TEM sample preparation | 75/hr | 30/hr |
| Cary 5G | Spectrophotometry | 75/hr | 30/hr |
| OL750 | Spectroradiometry | 75/hr | 30/hr |
| Gaertner Ellipsometer | Ellipsometry | 75/hr | 30/hr |
| FTIR | Fourier Transform Infrared Spectroscopy | 75/hr | 30/hr |
| Staff Time/Consulting | 45/hr | ||
Microfabrication Facility | |||
| INSTRUMENT | staff-assisted | self-use | |
| Raith E-Line E.B. | 130/hr | 85/hr | |
| Float Zone Furnace | 125/hr | 75/hr | |
| Cleanroom and all other instruments | 75/hr | 25/hr | |
| Nano Tube Furnace | 125/day | 75/day | |
| High-T CM Furnace | 125/day | 75/day | |
| All other furnaces | 100/day | 50/day | |
| Training/person/instrument | 50 | ||
Low Temperature (SQUID) Facility (rates do not include He) | |||
| INSTRUMENT | staff-assisted | self-use | |
| 1T | 200/day+50/hr | 200/day | |
| 7T | 200/day+50/hr | 200/day | |
| PPMS | 200/day+50/hr | 200/day | |